Publications

• ART

Accurate modelling of large angle tilt (LATID) and pure vertical implantations : application to the simulation of n- and p-LDMOS backgates

Evelyne Lampin, Emmanuel Dubois, H. Xu, S. Bardy, F. Murray

The lateral and vertical extensions of the backgate of complementary laterally diffused metal oxide semiconductor (LDMOS) are simulated. The importance of channeling for a large-angle tilt implantation and a purely vertical (0°) implantation are studied with the atomistic simulator Crystal-TRIM.…

IEEE Transactions on Electron Devices, 2003, 50 (5), pp.1401-1404. ⟨10.1109/TED.2003.813464⟩. ⟨hal-00146392⟩

• ART

Strain determination in silicon microstructures by combined TEM/CBED, process simulation and micro-Raman spectroscopy

V. Senez, A. Armigliato, I. de Wolf, G. Carnevale, R. Balboni, S. Frabboni, A. Benedetti

Test structures consisting of shallow trench isolation (STI) structures are fabricated using advanced silicon (Si) technology. Different process parameters and geometrical features are implemented to investigate the residual mechanical stress in the structures. A technology computer aided design…

Journal of Applied Physics, 2003, 94 (9), pp.5574-5583. ⟨10.1063/1.1611287⟩. ⟨hal-00146408⟩

• COMM

Low-frequency drain noise in AlGaN/GaN HEMTs on Si substrate

N. Malbert, N. Labat, A. Curutchet, A. Touboul, Christophe Gaquière, A. Minko

2003, pp.342-349. ⟨hal-00162738⟩

• ART

Terahertz frequency generation : electronic and photonic approach

D. Lippens

La Revue de l'électricité et de l'électronique, 2003, 1, pp.25-31. ⟨hal-00162726⟩

• COMM

Noise modelling of 0.25 µm fully depleted SOI MOSFETs

G. Pailloncy, Gilles Dambrine, Francois Danneville, B. Iniguez, J.P. Raskin

2003, pp.577-580. ⟨hal-00145992⟩

• COMM

Double-gate HEMTs on transferred substrate

Nicolas Wichmann, I. Duszynski, T. Parenty, S. Bollaert, J. Mateos, X. Wallart, A. Cappy

2003, pp.118-121. ⟨hal-00145995⟩

• COMM

SU-8 technology and monolithic columns for integration in a biological lab-on-chip

Julien Carlier, S. Le Gac, S. Arscott, V. Thomy, J.C. Fourrier, F. Caron, C. Cren-Olive, C. Rolando, J.C. Camart, P. Tabourier

2003, pp.315-318. ⟨hal-00146385⟩

• COMM

New Schottky source/drain architectures

Emmanuel Dubois

Workshop Micro et Nanoélectronique, 2003, Crolles, France. ⟨hal-00146417⟩

• ART

Lead Zirconate Titanate (PZT) Films Deposited by a Hydrothermal Method

Sébastien Euphrasie, Sylvie Daviero-Minaud, Philippe Pernod

Solid State Sciences, 2003, 5 (11-12), pp.1499-1504. ⟨hal-00258427⟩

• ART

Hydrothermal synthesis of PbTiO3 ferroelectric films : characterizations with large frequency and temperature ranges and sensor application

Didier Fasquelle, Jean-Claude Carru, S. Euphrasie, Philippe Pernod, S. Daviero-Minaud

Hydrothermal synthesis is an original way for the deposition of ferroelectric films. It allows to deposit a film with a few micrometers thick on a titanium substrate with various geometrical shapes. X-ray diffraction studies have shown a good nucleation without preferential orientation. S.E.M…

Ferroelectrics, 2003, 288 (1), pp.39-48. ⟨10.1080/00150190390212070⟩. ⟨hal-00146117⟩