Publications

• Communication dans un congrès

Cymbal flextensional transducers. Biomedical arrays, design and fabrication studies

D. Markley, R. Newnham, R. Meyer, W.J. Hughes, N. Smith, S. Yip Lee, Anne-Christine Hladky

American Ceramic Society 105th Annual Meeting, 2003, Nashville,TN, United States. ⟨hal-00145964⟩

• Communication dans un congrès

Origin of fluid streaming in low-frequency sonoreactors

Bertrand Dubus, C. Campos-Pozuelo, A. Moussatov, C. Granger, P. Mosbah, C. Vanhille

Proceedings of the 4th Conference on the Applications of Power Ultrasound in Physical and Chemical Processing, 2003, Besançon, France. ⟨hal-00145974⟩

• Communication dans un congrès

Détermination des paramètres limitant la montée des MOSFETs sub-100nm

M. Vanmackelberg, Sylvie Lepilliet, C. Raynaud, M. Dehan, Gilles Dambrine

2003, pp.1D-5. ⟨hal-00145999⟩

• Communication dans un congrès

Sommation optique de signaux hyperfréquences

N. Breuil, C. Fourdin, P. Nicole, G. Ulliac, Jean-Pierre Vilcot, J. Chazelas

2003, pp.6C-6. ⟨hal-00146559⟩

• Communication dans un congrès

Study and realisation of a micromechanical relay for use in harsh environment

F. Conseil, P. Derderian, M.F. Ravat, D. Collard, L. Buchaillot

2003, pp.108-112. ⟨hal-00146461⟩

• Article dans une revue

About the measurements of the d33 piezoelectric coefficient of the PZT film-Si/SiO2/Ti/Pt substrates using an optical cryostat

J. Nosek, L. Burianova, M. Sulc, Caroline Soyer, Eric Cattan, Denis Remiens

Ferroelectrics, 2003, 292, pp.103-109. ⟨hal-00146464⟩

• Communication dans un congrès

Feedback of MEMS reliability study on the design stage : a step toward reliability aided design (RAD)

L. Buchaillot

14th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, ESREF 2003, 2003, Arcachon, France. ⟨hal-00146457⟩

• Communication dans un congrès

Reliable micromechanical relay for use in rough environment

F. Conseil, P. Derdeiran, M.F. Ravat, D. Collard, L. Buchaillot

2003, pp.243-247. ⟨hal-00146459⟩

• Communication dans un congrès

Thermally actuated probe arrays for manipulation and characterization of individual bio-cell

Beomjoon Kim, Dominique Collard, Matthieu Lagouge, F. Conseil, Bernard Legrand, Lionel Buchaillot

We introduce a new concept of thermal micro-actuators combined with electrical sensor device to capture and characterize individual living bio-cell. In our micro fabricated device, cantilevers integrated with sensing part (surface micro-machined poly-silicon) and actuation using the difference of…

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun 2003, Boston, MA, United States. pp.1255-1258, ⟨10.1109/SENSOR.2003.1217000⟩. ⟨hal-00146460⟩

• Communication dans un congrès

Physics-based process simulation of ultrashallow junctions

N.E.B. Cowern, B. Colombeau, R. Duffy, V. Venezia, C. Dachs, R. Lindsay, Fuccio Cristiano, E. Lampin, Alain Claverie

Ultra-Shallow Junctions Worshop, 2003, Santa Cruz, CA, United States. ⟨hal-00146422⟩