Publications

• Communication dans un congrès

Reliable micromechanical relay for use in rough environment

F. Conseil, P. Derdeiran, M.F. Ravat, D. Collard, L. Buchaillot

2003, pp.243-247. ⟨hal-00146459⟩

• Communication dans un congrès

Feedback of MEMS reliability study on the design stage : a step toward reliability aided design (RAD)

L. Buchaillot

14th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, ESREF 2003, 2003, Arcachon, France. ⟨hal-00146457⟩

• Communication dans un congrès

Thermally actuated probe arrays for manipulation and characterization of individual bio-cell

Beomjoon Kim, Dominique Collard, Matthieu Lagouge, F. Conseil, Bernard Legrand, Lionel Buchaillot

We introduce a new concept of thermal micro-actuators combined with electrical sensor device to capture and characterize individual living bio-cell. In our micro fabricated device, cantilevers integrated with sensing part (surface micro-machined poly-silicon) and actuation using the difference of…

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun 2003, Boston, MA, United States. pp.1255-1258, ⟨10.1109/SENSOR.2003.1217000⟩. ⟨hal-00146460⟩

• Article dans une revue

Feedback of MEMS reliability study on the design stage : a step toward reliability aided design (RAD)

L. Buchaillot

Microelectronics Reliability, 2003, 43, pp.1919-1928. ⟨hal-00146437⟩

• Article dans une revue

Strain determination in silicon microstructures by combined TEM/CBED, process simulation and micro-Raman spectroscopy

V. Senez, A. Armigliato, I. de Wolf, G. Carnevale, R. Balboni, S. Frabboni, A. Benedetti

Test structures consisting of shallow trench isolation (STI) structures are fabricated using advanced silicon (Si) technology. Different process parameters and geometrical features are implemented to investigate the residual mechanical stress in the structures. A technology computer aided design…

Journal of Applied Physics, 2003, 94 (9), pp.5574-5583. ⟨10.1063/1.1611287⟩. ⟨hal-00146408⟩

• Article dans une revue

Lead Zirconate Titanate (PZT) Films Deposited by a Hydrothermal Method

Sébastien Euphrasie, Sylvie Daviero-Minaud, Philippe Pernod

Solid State Sciences, 2003, 5 (11-12), pp.1499-1504. ⟨hal-00258427⟩

• Article dans une revue

Wide and narrow-band bandpass coplanar filters in the W-frequency band

Eric Rius, Gaëtan Prigent, H. Happy, Gilles Dambrine, Samuel Boret, A. Cappy

This paper deals with the design of passive coplanar devices in the W-frequency band. As long as coplanar transmission lines are correctly dimensioned, analytical models based on quasi-TEM approximation can be used. Such models are associated with a correct definition of the reference planes at the…

IEEE Transactions on Microwave Theory and Techniques, 2003, 51 (3), pp.784-791. ⟨10.1109/TMTT.2003.808586⟩. ⟨hal-00145985⟩

• Article dans une revue

Influence of MBE growth conditions on the quality of InAlAs/InGaAs metamorphic HEMTs on GaAs

Yvon Cordier, P. Lorenzini, Jean Michel Chauveau, D. Ferré, Ydir Androussi, J. Di Persio, Dominique Vignaud, Jean-Louis Codron

In this work, we investigate the influence of the growth temperature and the arsenic flux on the quality of InAlAs/InGaAs metamorphic HEMTs on GaAs with inverse step based InAlAs buffer layers. We show besides the temperature, how the composition modulations make the arsenic flux a critical…

Journal of Crystal Growth, 2003, 251, pp.822. ⟨10.1016/S0022-0248(02)02316-3⟩. ⟨hal-00018494⟩

• Article dans une revue

Terahertz frequency generation : electronic and photonic approach

D. Lippens

La Revue de l'électricité et de l'électronique, 2003, 1, pp.25-31. ⟨hal-00162726⟩

• Communication dans un congrès

Low-frequency drain noise in AlGaN/GaN HEMTs on Si substrate

N. Malbert, N. Labat, A. Curutchet, A. Touboul, Christophe Gaquière, A. Minko

2003, pp.342-349. ⟨hal-00162738⟩