Publications

• Article dans une revue

A micro-electro-mechanical accelerometer based on gallium nitride on silicon

C. Morelle, D. Théron, I. Roch-Jeune, Pascal Tilmant, Etienne Okada, F. Vaurette, Bertrand Grimbert, Joff Derluyn, Stefan Degroote, Marianne Germain, M. Faucher

We report on an accelerometer micro-sensor based on epitaxial gallium nitride and silicon. The device is a vibrating beam accelerometer fabricated with a micro-electro-mechanical-system technology starting from an AlGaN/GaN heterostructure grown on silicon. The vibrating GaN beam has integrated…

Applied Physics Letters, 2023, 122 (3), pp.033502. ⟨10.1063/5.0127987⟩. ⟨hal-03945292⟩

• Chapitre d'ouvrage

Chapter 9 - Modeling of power ultrasonic transducers

Bertrand Dubus, Charles Croënne, Pascal Mosbah

Ultrasonic systems are usually comprised of three elements: a generator providing the electrical energy, an electromechanical transducer converting electrical energy into mechanical vibratory energy, and a propagation medium, fluid or solid, in which acoustic energy is radiated. These devices…

EDS Juan A. Gallego-Juárez; Karl F. Graff; Margaret Lucas. Power Ultrasonics (Second Edition) Applications of High-Intensity Ultrasound, Woodhead Publishing Series in Electronic and Optical Materials, Elsevier, pp.147-159, 2023, ISBN 978-0-12-820254-8. ⟨10.1016/B978-0-12-820254-8.00034-8⟩. ⟨hal-04132344⟩

• Communication dans un congrès

Récepteur Wake-up radio basé sur des réseaux de neurones à impulsions pour la détection de séquence

Guillaume Marthe, Claire Goursaud, Laurent Clavier

La consommation énergétique est un point critique dans le domaine de l'Internet des Objets. La Wake-Up Radio permet de laisser le plus possible les noeuds en mode veille et de les réveiller seulement si besoin. Malheureusement, les wakeup radios actuels utilisent des microcontroleurs toujours…

CoRes 2023 - 8èmes Rencontres Francophones sur la Conception de protocoles, l'évaluation de performances et l'expérimentation de Réseaux de communication, May 2023, Cargese, France. pp.1-4. ⟨hal-04090633⟩

• Article dans une revue

Highly stable fluorine-free slippery liquid infused surfaces

Anne-Sophie Vaillard, Manon Saget, Flavie Braud, Marc Lippert, Laurent Keirsbulck, Maude Jimenez, Yannick Coffinier, Vincent Thomy

A promising Slippery Liquid Infused Surface (SLIS) has been developed, that is both easy-to-produce and environmentally friendly. Using a double replication method, a 200 µm-thick texturized cross-linked PDMS film was obtained, leading to a grid of micrometric hills and deep wells. A comparison…

Surfaces and Interfaces, 2023, 42, Part A, pp.103296. ⟨10.1016/j.surfin.2023.103296⟩. ⟨hal-04215387⟩

• Communication dans un congrès

THz topological Waveguides in 600 GHz frequency Region

Abdu Subahan Mohamed, Edouard Lebouvier, Gaëtan Lévêque, Yan Pennec, Marc Faucher, Alberto Amo, Pascal Szriftgiser, Guillaume Ducournau

We experimentally demonstrate a silicon-based valley photonic crystal (VPC) waveguide for the 590-620 GHz frequency region. We specifically conduct measurements on the transmission and group delay for normal silicon waveguides and Valley photonic crystal waveguides and state that topological valley…

2023 48th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), Sep 2023, Montreal, Canada. ⟨10.1109/IRMMW-THz57677.2023.10298871⟩. ⟨hal-04277479⟩

• Communication dans un congrès

Light and Efficient Authentication Mechanism for Connected Vehicles Using Unsupervised Detection

Ramzi Boutahala, Hacène Fouchal, Marwane Ayaida, Shiwen Mao

IEEE International Conference on Communications (ICC), 2023, Rome, Italy. pp.329-333, ⟨10.1109/ICC45041.2023.10279812⟩. ⟨hal-04297399⟩

• Article dans une revue

Homo-epitaxial growth of LiNbO3 thin films by Pulsed Laser deposition

Laura Sauze, Nicolas Vaxelaire, Roselyne Templier, Denis Rouchon, François Pierre, Cyril Guedj, Denis Remiens, Guillaume Rodriguez, Marie Bousquet, Florian Dupont

With the deployment of the 5th Generation of mobile applications (5G), the performances of radio-frequency (RF) filters are pushed to their limits. Highly crystalline piezoelectric materials with an electromechanical coupling coefficient higher than aluminium nitride are of high interest. Lithium…

Journal of Crystal Growth, 2023, 601, pp.126950. ⟨10.1016/j.jcrysgro.2022.126950⟩. ⟨hal-03862259⟩

• Article dans une revue

One-channel time reversal focusing of ultra-high frequency acoustic waves on a MEMS

Hatem Dahmani, Nikolay Smagin, P. Campistron, J. Carlier, Malika Toubal, Bertrand Nongaillard

This Letter reports on a work performed to fabricate and characterize a silicon micro-machined cavity dedicated to micro-resolution Ultra-High Frequency imaging in microfluidics and microbiological applications using one-channel time reversal. Time reversal provides the means to spatially and…

Applied Physics Letters, 2023, 122 (10), pp.102201. ⟨10.1063/5.0142179⟩. ⟨hal-04215309⟩

• Article dans une revue

Fabrication of silicon nitride membrane nanoelectromechanical resonator

Hao Xu, Srisaran Venkatachalam, Christophe Boyaval, Pascal Tilmant, Francois Vaurette, Yves Deblock, Didier Theron, Xin Zhou

In this work, we present details of the nanofabrication process for achieving a silicon nitride nanoelectromechanical resonator, consisting of a membrane covered with a thin aluminium layer capacitively coupled to a suspended top gate. Critical nanofabrication steps have been discussed, including…

Microelectronic Engineering, 2023, 280, pp.112064. ⟨10.1016/j.mee.2023.112064⟩. ⟨hal-04172152⟩

• Article dans une revue

Enhancing Magnetoelastic Coupling in Shear Surface Acoustic Waveguide Based on ST-Cut Quartz Substrate and Ni Thin Films With Uniaxial Magnetic Anisotropy Induced by Thermal Annealing

Othmane Marbouh, Aurelien Mazzamurro, Olivier Bou Matar, Nicolas Tiercelin, Yannick Dusch, Daniel Laloy, Khalid Ettihir, Abdelmounaim Tounzi, Abdelkader Benabou, Abdelkrim Talbi

In this study, we conduct a comprehensive investigation to enhance the performance of shear surface acoustic wave (SAW) magnetic sensors. We explore the interaction between SAW and a nickel film deposited on ST-cut quartz in a delay line configuration. The nickel film, measuring 2 mm in width and…

IEEE Sensors Letters, 2023, 7 (12), pp.2505504. ⟨10.1109/LSENS.2023.3330639⟩. ⟨hal-04324269⟩