Publications

• Communication dans un congrès

Polydimethylsiloxane micro-channels application for the study of dynamic wetting of nano-etched silicon surfaces based on acoustic characterization method

Abbas Salhab, Julien Carlier, Pierre Campistron, M. Neyens, Malika Toubal, Bertrand Nongaillard, V. Thomy

Efficient cleaning of contaminations in the semiconductor industry is a determining factor in ensuring the good quality of the electronics products. We present here the dynamic wetting characterization of a fluid on top of Deep Trench Isolation (DTI) structures using ultra-high frequency acoustic…

15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2021, Session 6 - Wet processing in narrow spaces and pattern collapse, Apr 2021, Virtual, Unknown Region. pp.143-149, ⟨10.4028/www.scientific.net/SSP.314.143⟩. ⟨hal-03362264⟩

• Chapitre d'ouvrage

Chapter 6. Exploring and talking about music

Arthur Paté, Pascal Gaillard

Sensory Experiences - Exploring meaning and the senses, 24, John Benjamins Publishing Company, pp.213-247, 2021, Converging Evidence in Language and Communication Research, 9789027209801. ⟨10.1075/celcr.24.06pat⟩. ⟨hal-03619356⟩

• Communication dans un congrès

[Invited workshop] Nanorobotic On-Wafer Probe Station Under Scanning Electron Microscope

Kamel Haddadi

15th European Microwave Week - Workshop Measurements at mmWave and Terahertz Frequencies of Three Measurement Quantities: S-Parameters, Power, and Complex Permittivity of Dielectric Materials, Jan 2021, Utrecht, Netherlands. ⟨hal-03582098⟩

• Article dans une revue

Radiation environment and doses on Mars at Oxia Planum and Mawrth Vallis: support for exploration at sites with high biosignature preservation potential

F. da Pieve, G. Gronoff, J. Guo, C. J. Mertens, L. Neary, B. Gu, N. E. Koval, J. Kohanoff, A. C. Vandaele, F. Cleri

The first human missions on MARS will likely involve several astrobiology‐driven science operations, at sites with high biosignature preservation potential. Here, we present a study of the radiation environment induced by Galactic Cosmic Rays and Solar Energetic Particles at OXIA PLANUM, landing…

Journal of Geophysical Research. Planets, 2021, 126 (1), 20 p. ⟨10.1029/2020JE006488⟩. ⟨hal-03135961⟩

• Article dans une revue

Near-field scanning millimeter-wave microscope operating inside a scanning electron microscope: towards quantitative electrical nanocharacterization

Petr Polovodov, Didier Theron, Clément Lenoir, D. Deresmes, Sophie Eliet, Christophe Boyaval, Gilles Dambrine, Kamel Haddadi

The main objectives of this work are the development of fundamental extensions to the existing scanning microwave microscopy (SMM) technology to achieve quantitative complex impedance measurements at the nanoscale. We developed an SMM operating up to 67 GHz inside a scanning electron microscope…

Applied Sciences, 2021, 11 (6), pp.2788. ⟨10.3390/app11062788⟩. ⟨hal-03320954v2⟩

• Article dans une revue

Optimization of Reactive-Ion Etching (RIE) parameters to maximize the lateral etch rate of silicon using SF6/N2 gas mixture: An alternative to etching Si in MEMS with Au components

Munique Kazar Mendes, Cécile Ghouila-Houri, Serria Hammami, Thomas Arnoult, Philippe Pernod, Abdelkrim Talbi

In this work, the effects of the N2 addition to the SF6 plasma used in the isotropic silicon etching of Microelectromechanical systems (MEMS) with Au components are investigated. A four-variables Doehlert design was implemented for optimizing the etching parameters (power, pressure, gas flow rate,…

Materials Letters, 2021, 285, pp.129058. ⟨10.1016/j.matlet.2020.129058⟩. ⟨hal-03330078⟩

• Article dans une revue

Oxygen vacancy engineering of TaO$_x$-based resistive memories by Zr doping for improved variability and synaptic behavior

João Palhares, Yann Beilliard, F. Alibart, Everton Bonturim, Daniel de Florio, Fabio Fonseca, Dominique Drouin, Andre Ferlauto

Resistive switching (RS) devices are promising forms of non-volatile memory. However, one of the biggest challenges for RS memory applications is the device-to-device (D2D) variability, which is related to the intrinsic stochastic formation and configuration of oxygen vacancy (V$_O$) conductive…

Nanotechnology, 2021, 32 (40), pp.405202. ⟨10.1088/1361-6528/ac0e67⟩. ⟨hal-03539056⟩

• Communication dans un congrès

Nanoprobe study of the electric field driven insulator-to-metal transition in GaMo4S8

H. Koussir, Isabelle Lefebvre, Maxime Berthe, B. Grandidier, Pascale Diener, J. Tranchant, Benoit Corraze, Etienne Janod, Laurent Cario

The resistive switching observed under electric pulses in Mott materials has a high potential for micro and nanoelectronics. Here we report on the study of the resistive switching observed at the surface of single crystals of the canonical Mott semiconductor GaMo4S8. The study is made using a…

Journées du GDR Nanosciences with near-field microscopy under ultra high vacuum 2021, Nov 2021, Toulouse, France. ⟨hal-03606122⟩

• Article dans une revue

MMIC Vector Topology Enabling Multi RF Functionalities for 5G and Beyond

Christophe Loyez, Michael Bocquet, Kamel Haddadi

This paper presents a vector topology of a monolithic microwave integrated circuit (MMIC) capable of performing several radiofrequency (RF) functionalities essential for future wireless communications and geolocation in the millimeter frequency band. The proposed circuit can address several usage…

IEEE Access, 2021, 9, pp.114418-114427. ⟨10.1109/ACCESS.2021.3098179⟩. ⟨hal-03334163⟩

• Communication dans un congrès

Cavity flow controlled with an array of magneto-mechanical micro-valves

Thomas Arnoult, Cécile Ghouila-Houri, Colin Leclercq, Aurélien Mazzamurro, Romain Viard, Eric Garnier, Denis Sipp, Alain Merlen, Abdelkrim Talbi, Philippe Pernod

This paper presents and discusses micro-magneto-mechanical valves designed for cavity flow control. Realized using microfabrication techniques and rapid prototyping, the micro-valves exhibit a small footprint and adequate performances for low-speed cavity flow control. An array of 15 micro-valves…

2021 IEEE Sensors, Oct 2021, Sydney, Australia. pp.1-4, ⟨10.1109/SENSORS47087.2021.9639871⟩. ⟨hal-03501259⟩