Publications

• Article dans une revue

Wetting characterization of high aspect ratio nanostructures by gigahertz acoustic reflectometry

Christophe Virgilio, Julien Carlier, Pierre Campistron, Malika Toubal, Philippe Garnier, L. Broussous, V. Thomy, Bertrand Nongaillard

Wetting efficiency of microstructures or nanostructures patterned on Si wafers is a real challenge in integrated circuits manufacturing. In fact, bad or non-uniform wetting during wet processes limits chemical reactions and can lead to non-complete etching or cleaning inside the patterns and device…

International Journal of Mechanical and Mechatronics Engineering, 2016, 10 (3), pp.413-418. ⟨hal-03560404⟩

• Communication dans un congrès

New Optical Approach of SAW Delay Line Characterization

Lyes Djoumi, Nikolay Smagin, Meddy Vanotti, Dame Fall, Etienne Herth, Marc Duquennoy, Mohammadi Ouaftouh, Virginie Blondeau-Patissier, Frédéric Jenot

Surface acoustic wave devices are usually characterized solely through their electrical parameters. Mechanical displacements can also be numerically computed using finite element software. In this paper, we show that this characterization can be supplemented using an interferometer system capable…

30th Eurosensors Conference, EUROSENSORS XXX, Sep 2016, Budapest, Hungary. pp.838-843. ⟨hal-03586205⟩

• Article dans une revue

On-chip and freestanding elastic carbon films for micro-supercapacitors

Peihua Huang, Christophe Lethien, Sébastien Pinaud, Kevin Brousse, Raphaël Laloo, Viviane Turq, Marc Respaud, Arnaud Demortiere, Barbara Daffos, Pierre-Louis Taberna, Bruno Chaudret, Yury Gogotsi, Patrice Simon

Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium…

Science, 2016, 351 (6274), pp.691-695. ⟨10.1126/science.aad3345⟩. ⟨hal-01489186⟩

• Communication dans un congrès

In-situ solder surface tension measurements using mechanical resonances

Assane Ndieguene, Jean-Francois Morissette, Nathalie Normand, Julien Sylvestre

2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), Apr 2016, Montpellier, France. ⟨10.1109/EuroSimE.2016.7463343⟩. ⟨hal-01927506⟩

• Communication dans un congrès

Etude par nanoindentation des proprietes mecaniques du multicouche constituant une cellule solaire a base de cigs

Hocine Abib, Alain Iost, Alex Montagne, Khadidja Rahmoun, Boubakeur Ayachi, Jean-Pierre Vilcot

Le but de notre travail est d'évaluer les propriétés mécaniques des différentes couches constituant une cellule solaire à base de CIGS afin d'en appréhender, à terme, leur influence sur la durée de vie de la cellule. Nous rapportons principalement les valeurs de la dureté et le module de…

Indentation 2016, Oct 2016, Lille, France. ⟨hal-03169269⟩

• Communication dans un congrès

A practical method for improving mobile devices trajectory estimation via MEMs accelerometers

K. Saidi, Marie Zwingelstein, Ali Khanafer, M. Asmani, Sébastien Grondel

The challenging research area of locating a mobile device has gained interest in recent years with the emergence of wireless sensor networks (WSN) as well as of low-cost sensors based on micro-electromechanical systems (MEMS). This paper focuses on the dead reckoning (DR) algorithm which doubly…

11th France-Japan Congress / 9th Europe-Asia Congress on Mechatronics (MECATRONICS) / 17th International Conference on Research and Education in Mechatronics (REM), Jun 2016, Compiegne, France. paper CD-000914, 103-110. ⟨hal-03280241⟩

• Communication dans un congrès

Metal/insulator/semiconductor contacts for ultimately scaled CMOS nodes: projected benefits and remaining challenges

Julien Borrel, Louis Hutin, Helen Grampeix, Emmanuel Nolot, Magali Tessaire, Guillaume Rodriguez, Yves Morand, Fabrice Nemouchi, Magali Gregoire, Emmanuel Dubois, Maud Vinet

In this paper, some key fundamental aspects of Metal / Insulator / Semiconductor contacts as well as practical issues occurring with their implementation are reviewed in order to fully comprehend the opportunities and limitations of this approach.

IWJT 2016 - 16th International Workshop on Junction Technology, May 2016, Shanghai, China. pp.14-19. ⟨hal-03325000⟩

• Chapitre d'ouvrage

Structural health monitoring

Vladan Koncar, Sébastien Grondel

Daniel Coutellier. Composites technologies for transport applications : a roadmap, pp.95-115, 2016, 978-2-9559182-1-0. ⟨hal-03572033⟩

• Communication dans un congrès

Polarimetric indoor measurements at 94 GHz

Maria-Teresa Martinez-Ingles, Jose-Maria Garcia-Pardo, Davy Gaillot, Juan Pascual-Garcia, Jose-Victor Rodriguez, Leandro Llacer, M. Lienard

10th European Conference on Antennas and Propagation, EuCAP 2016, Apr 2016, Davos, Switzerland. 3 p., ⟨10.1109/EuCAP.2016.7481453⟩. ⟨hal-03346248⟩

• Article dans une revue

In-flow detection of ultra-small magnetic particles by an integrated giant magnetic impedance sensor

Kamel Fodil, Matthieu Denoual, Christophe Dolabdjian, A. Treizebre, Vincent Senez

Applied Physics Letters, 2016, ⟨10.1063/1.4948286⟩. ⟨hal-01417815⟩