Publications

• Article dans une revue

Performances of the negative tone resist AZnLOF 2020 for nanotechnology applications

Etienne Herth, Emmanuelle Algre, Pascal Tilmant, Martin François, Christophe Boyaval, Bernard Legrand

We present electron-beam lithography results on an AznLOF2020 UV negative tone resist. This study aims to define electron-beam lithography parameters compatible with microelectromechanical systems/nanoelectromechanical systems fabrication. Usually, one of the properties of the resist material is…

IEEE Transactions on Nanotechnology, 2012, 11 (4), pp.854-859. ⟨10.1109/TNANO.2012.2196802⟩. ⟨hal-00787415⟩

• Communication dans un congrès

Micro-résonateurs haute fréquence pour la microscopie à force atomique

B. Walter, M. Faucher, E. Mairiaux, Z. Xiong, L. Buchaillot, Bernard Legrand

Journées Nationales du GDR Micro Nano Systèmes-Micro Nano Fluidique, 2012, Bordeaux, France. ⟨hal-00797720⟩

• Article dans une revue

MEMS ring resonators for laserless AFM with sub-nanoNewton force resolution

Emmanuelle Algre, Zhuang Xiong, Marc Faucher, Benjamin Walter, Lionel Buchaillot, Bernard Legrand

A concept of atomic force microscopy (AFM) oscillating sensors using electromechanical silicon microresonators is presented, and imaging capabilities are demonstrated. The microresonators are designed to feature MHz resonance frequencies, and they are batch fabricated using standard silicon…

Journal of Microelectromechanical Systems, 2012, 21, pp.385-397. ⟨10.1109/JMEMS.2011.2179012⟩. ⟨hal-00787407⟩

• Communication dans un congrès

The thermal effect on the output conductance in AlGaN/GaN HEMT's

A. Bellakhdar, A. Telia, L. Semra, A. Soltani

24th International Conference on Microelectronics, ICM 2012, 2012, Algiers, Algeria. pp.1-4, ⟨10.1109/ICM.2012.6471365⟩. ⟨hal-00814968⟩

• Communication dans un congrès

Intelligent transports systems based on UWB technologies

Fouzia Boukour, Atika Rivenq

Ultra Wide Band (UWB) may offer very efficient solutions for various communication and localisation transport applications. We propose to use this technique to establish communication vehicle- to- vehicle and vehicle- to-infrastructure. In fact, compared to traditional carrier-based, Ultra-Wide…

IEEE European Wireless Conference, Sep 2012, Poland. 5p. ⟨hal-01068408⟩

• Communication dans un congrès

A direct conversion IQ modulator in CMOS 65 nm SOI for multi-gigabit 60 GHz systems

Christophe Loyez, A. Siligaris, P. Vincent, A. Cathelin, N. Rolland

7th European Microwave Integrated Circuits Conference, EuMIC 2012, 2012, Amsterdam, Netherlands. pp.5-7. ⟨hal-00814970⟩

• Chapitre d'ouvrage

Advanced coding, modulation and signal processing

Laurent Clavier, D. Vukobratovic, M. Wetz, W. Teich, A. Czylwik, K. Kansanen

Verdone R., Zanella A. Pervasive mobile and ambient wireless communications, Springer London, pp.Part 2, 373-404, 2012, ISBN 978-1-4471-2314-9. ⟨10.1007/978-1-4471-2315-6_9⟩. ⟨hal-00798936⟩

• Chapitre d'ouvrage

Indoor positioning system based on the ultra wide band for transport applications

Fouzia Elbahhar, B. Fall, Atika Rivenq, Marc Heddebaut, Raja Elassali

Elbahhar F., Rivenq A. New approach of indoor and outdoor localization systems, InTech, Chapter 4, 1-20, 2012, ISBN 978-953-51-0775-0. ⟨10.5772/50017⟩. ⟨hal-00798969⟩

• Autre publication scientifique

Communications numériques sur les réseaux d'énergie des systèmes de transport

Virginie Degardin

2012. ⟨hal-00799255⟩

• Autre publication scientifique

Etude et réalisation de microgénérateurs thermoélectriques planaires en technologie silicium

Zheng Yuan

2012. ⟨hal-00799349⟩