Publications

• ART

Low-loss InGaAsP/InP submicron optical waveguides fab ricated by ICP etching

Samuel Dupont, Arnaud Beaurain, Patrice Miska, Malek Zegaoui, Jean-Pierre Vilcot, Hongwu Li, M. Constant, Didier Decoster, Jean Chazelas

The fabrication and characterisation of low-loss InGaAsP/InP optical submicron waveguides made with ICP etching is reported. Their width ranges from 0.2 to 2 µm. For the 0.5 µm width, the propagation losses at =1.55 µm as low as 4.2 dB/mm have been measured.

Electronics Letters, 2004, 40(14), pp.865-866. ⟨10.1049/el:20040502⟩. ⟨hal-00270000⟩

• OTHER

Simulation, conception et réalisation d'un commutateur en technologie microsystème pour dispositifs logiques sécuritaires

F. Conseil

2004. ⟨hal-00141010⟩

• OTHER

Etude et réalisation de photodiodes-guides millimétriques de puissance à 1,5 microns

N. Michel

2004. ⟨hal-00141172⟩

• ART

Optimization of HSQ resist e-beam processing technique on GaAs material

D. Lauvernier, Jean-Pierre Vilcot, M. Francois, Didier Decoster

Microelectronic Engineering, 2004, 75, pp.177-182. ⟨hal-00141186⟩

• ART

Probing nanoscale dipole-dipole interactions by electric force microscopy

Thierry Melin, H. Diesinger, D. Deresmes, D. Stievenard

Physical Review Letters, 2004, 92, pp.166101-1-4. ⟨hal-00141249⟩

• COMM

Démultiplexeur nanométriques à plasmons

Maxime Beaugeois, L. Dobrzynski, Abdellatif Akjouj, Bahram Djafari-Rouhani, Jerome O. Vasseur, Mohamed Bouazaoui, Jean-Pierre Vilcot, J.P. Vigneron

GDR Ondes, 2004, Orsay, France. ⟨hal-00141207⟩

• COMM

Conductivity change in a metal/pentacen/metal device

D. Tondelier, K. Lmimouni, David Troadec, C. Dufour, D. Vuillaume, C. Fery, J.P. Dagois, G. Haas

European Materials Research Society Spring Meeting, 2004, Strasbourg, France. ⟨hal-00140739⟩

• COMM

Diodes moléculaires auto-assemblées sur silicium

S. Lenfant, C. Merckling, David Guérin, D. Vuillaume, F. Tran Van, C. Chevrot

Journées Nationales du GDR Nanoélectronique, 2004, Aussois, France. ⟨hal-00140745⟩

• COMM

Microfluidic devices to measure the electrical impedance of single bio-cells

V. Senez, T. Yamamoto, B. Poussard, T. Fukuba, J.M. Capron, T. Fujii

2004, pp.53-56. ⟨hal-00141029⟩

• COMM

Numerical analysis of the process induced stresses in micromachined cantilever

V. Senez, T. Hoffmann

2004, pp.126-131. ⟨hal-00141034⟩