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Fabrication and optimization of high frequency ZnO transducers for both longitudinal and shear emission: application of viscosity measurement using ultrasound

Hatem Dahmani, Ibrahim Zaaroura, Abbas Salhab, Pierre Campistron, Julien Carlier, Malika Toubal, Souad Harmand, V. Thomy, Marc Neyens, Bertrand Nongaillard

This paper covers the study of high-frequency (~ 1 GHz) ZnO piezoelectric transducer integrated on a silicon substrate able to generate both compressional and shear acoustic waves. First, to promote the longitudinal mode, an electrical matching of the transducer in this high-frequency range is…

Advances in Science, Technology and Engineering Systems Journal, 2020, 5 (6), pp.1428-1435. ⟨10.25046/aj0506173⟩. ⟨hal-03129037⟩

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