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Lithium Niobate Micro-transducers matrix design

Hala El Rammouz, Farouk Benmeddour, Jamal Assaad, Emmanuel Moulin, Lucie Dupont, Nikolay Smagin, Youssef Zaatar, Ziad Herro

In this work, a two-dimensional (2D) Lithium Niobate (LiNbO 3 ) 36°Y-cut micro-transducers (μTs) matrix design is presented. Two main steps define the fabrication process: electrode deposition and photolithography. These steps are preceded by the optical mask conception, which defines the 2D matrix…

1st International Conference of Engineering Risk (INCER 2019), Apr 2019, Beyrouth, Lebanon. pp.01001, ⟨10.1051/matecconf/201928101001⟩. ⟨hal-03594232⟩