Publications

Affichage de 3011 à 3020 sur 6562


  • Communication dans un congrès

Modeling of a PZT5A MEMS resonator disc partially metallized: Annular metallization

Ismail Naciri, Abdessamad Rguiti, Lahoucine Elmaimouni, Jean-Etienne Lefebvre, Faniry Emilson Ratolojanahary, Youssef Belkassmi, Salahddine Krit, Mohamed Rguiti, Tadeusz Gryba

An extension of the orthogonal polynomial approach in order to solve wave propagation in a MEMS resonator disc in the case of annular metallization is reported in the following paper. The disc is made from PZT5A and has been divided into two areas, the outer one with electrodes and the inner…

2017 International Conference on Engineering & MIS (ICEMIS), May 2017, Monastir, Tunisia. pp.1-8, ⟨10.1109/ICEMIS.2017.8272972⟩. ⟨hal-03564061⟩

  • Communication dans un congrès

RF reactive sputtering AlN thin film at room temperature for CMOS-compatible MEMS application

Wen-Juan Liu, Wei-Jiang Xu, Weizhen Wang, Le-Ming He, Jia Zhou, K. Radhakrishnan, Hao Yu, Jun-Yan Ren

Aluminum nitride (AlN) is widely used in SAW/FBAR devices, energy harvesting, biosensors, and ultrasonic transducers. The preparation of high-quality AlN film plays the key role on the process integration with CMOS circuits. Here, we report an AlN thin film prepared by RF reactive sputtering at…

2017 Joint IEEE International Symposium on the Applications of Ferroelectrics (ISAF)/International Workshop on Acoustic Transduction Materials and Devices (IWATMD)/Piezoresponse Force Microscopy (PFM), May 2017, Atlanta, United States. pp.52-55, ⟨10.1109/ISAF.2017.8000210⟩. ⟨hal-03585665⟩

  • Article dans une revue

Corporate Leverage and the Terms of Employment : Evidence from French Small Businesses before and during the Global Crisis

Ramzi Benkraiem, Mondher Bouattour, Anthony Miloudi, Ludovic Vigneron

Applied Economics, 2017, 49 (23), pp.2286-2297. ⟨hal-02927923⟩

  • Article dans une revue

A novel support vector machine robust model based electrical equaliser for coherent optical orthogonal frequency division multiplexing systems

Hichem Mrabet, Iyad Dayoub, Shyqyri Haxha, Rabah Attia, Sofien Mhatli, Elias Giacoumidis

IET Communications, 2017, 11 (7), pp.1091-1096. ⟨10.1049/iet-com.2016.1115⟩. ⟨hal-03382910⟩

  • Article dans une revue

Special issue on web information systems and technologies

Valérie Monfort, Tim A. Majchrzak

Computing, 2017, 99 (5), pp.429-430. ⟨10.1007/s00607-017-0544-y⟩. ⟨hal-03666431⟩